NOVELLUS

                                      

  IN OEM Ref. No. Part No. Description
26 15-00485-00 14-02002 Bracket, 150mm  
27 15-00578-00 14-02003 Sleeve, Flanged AC  
28 15-00680-00 14-02004 Sleeve, TC  
29 15-00700-00 14-02005 Plate, Fork Retainer, Bottom, 200mm  
30 15-00701-00 14-02006 Plate, Fork Retainer, Bottom, 150mm  
31 15-00703-00 14-02008 Plate, Fork Retainer, Top, 150mm  
32 15-00742-00 14-03001 Tube, TC, Ceramic
33 15-032777-00 14-03002 Exclusion Ring, 200mm, 2.0mm
34 15-055721-00 14-02005 Bushing, Split  
35 15-113064-00 14-02007 Nozzle, Injector, Single  
36 15-255841-00 14-02009 Nozzle, Injector, Split, MTL Seal  
37 15-257942-22 14-02010 Nozzle, Injector, Split  
38 15-283002-22 14-02011 Nozzle, Injector, Split, MTL Seal  
39 16-00098-00 14-02012 Wire, Insulated, Ceramic Bead, Long
40 19-00056-00 14-02013 Assy, Feedthrugh  
41 19-00266-01 14-02014 Motor, Extension, C1
42 19-00267-01 14-02015 Motor, Rotation, C1
43 19-00268-01 14-02016 Motor, Lift, C1
44 19-034573-04 14-02017 Bearing, Linear/Rotary 1" WTM  
45 20-00153-00 14-02018 Ball  Heater Support  2"  Ceramic  
46 22-10369-00 14-02019 Indexer Rotate Cylinder  
47 27-00010-01 14-02020 Thermocouple  Type J  1/8"  
48 27-00062-00 14-02021 Guage, Vacuum Pressure, TC  
49 27-00127-00 14-02022 Thermocouple  Type E  LG  
50 27-10052-00 14-02024 Power Supply, 5@7, 12@2, -12@1  


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Mattron supplies common electrical and mechanical components for semiconductor equipment.

Please email us at sales@mattron.com to check the availability of parts listed above.