NOVELLUS

                                      

  IN OEM Ref. No. Part No. Description
1 02-00343-02 14-01001 Harness Assy, 12"  
2 02-00343-03 14-01002 Harness Assy, 17.5"  
3 02-00343-04 14-01003 Harness Assy, 26.5"  
4 02-00393-05 14-01004 Assy, Sensor Harness, 23.75"  
5 02-00393-06 14-01005 Assy, Sensor Harness, 13.75"  
6 02-00397-00 14-01006 Harness Assy, Sensor 26.5"  
7 02-00402-02 14-01007 Harness Assy, Sensor 12.0"  
8 02-00402-03 14-01008 Harness Assy, Sensor 17.5"  
9 03-10641-00 14-01009 Driver Assembly, Left Indexer
10 03-10641-01 14-01010 Driver Assembly, Right Indexer
11 02-032278-00 14-01011 Assy, Z Motor, Indexer Left
12 02-032279-00 14-01012 Assy, Z Motor, Indexer Right
13 02-032280-00 14-01013 Assy, Ext. Motor, Indexer Left
14 02-032281-00 14-01014 Assy, Ext. Motor, Indexer Right
15 03-032766-00 14-01017 Harness Assy, Sensor, Left Indexer  
16 03-032766-01 14-01018 Harness Assy, Sensor, Right Indexer  
17 05-00024-00 14-01019 PM Kit, Heater Connector
18 15-00341-00 14-01020 Screw, HexHd, 1/4-20 x 1/4", Ni
19 15-00371-00 14-01021 Nut, Hex, 1/4-20, Ni
20 15-00372-00 14-01022 Washer, Flat, 1/4", Ni
21 15-00385-00 14-01023 Nut, Hex, 10-32, Ni
22 15-00386-00 14-01024 Washer, Flat, #10, Ni
23 15-00399-03 14-01026 Screw,Top Spindle,Ni  
24 15-00457-00 14-02002 Screw, HexHd, 10-32 x 3/8, Ni
25 15-00475-00 14-02004 Insulator, Gas Feedthrough, Ceramic


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Mattron supplies common electrical and mechanical components for semiconductor equipment.

Please email us at sales@mattron.com to check the availability of parts listed above.