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| IN | OEM Part No. | Part No. | Description | |
| 1 | 0010-05670 | AM001 | Roller Assembly 2 |
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| 2 | 0015-90001 | AM003 | Transducer, Modified, 0-3000PSI |
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| 3 | 0020-09617 | AM004 | Bushing, Rear | |
| 4 | 0020-10486 | AM005 | Rod, Spacer, DPA-Shrink | |
| 5 | 0020-20784 | AM007 | TC Holder | |
| 6 | 0020-21901 | AM009 | Bracket | |
| 7 | 0020-29310 | AM010 | Pin, 1/8'' Coil Support |
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| 8 | 0020-29342 | AM011 | Nut, RF Feedthru, .250" | |
| 9 | 0020-31017 | AM012 | Bushing Terminal | |
| 10 | 0020-31425 | AM013 | Mixer, Gas Box Lid | |
| 11 | 0020-31628 | AM014 | Insulating Washer | |
| 12 | 0020-70271 | AM015 | Pivot, One Piece, Left | |
| 13 | 0020-78554 | AM016 | Ring, 8" Wafer, Oxide | |
| 14 | 0021-12855 | AM017 | Housing, Quartz Tube TXZ 300mm |
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| 15 | 0021-13589 | AM018 | Cover Shuttle, Input Station | |
| 16 | 0021-16505 | AM019 | Upper Shield Exhaust 300mm TXZ | |
| 17 | 0021-19343 | AM020 | Ring, Nut Sector 300mm |
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| 18 | 0021-21469 | AM021 | Ring Restraint, 1.574 Dia Shaft, 8" |
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| 19 | 0021-35987 | AM022 | RF Strap, TxZ MCVD | |
| 20 | 0021-36021 | AM023 | Pin, Heater, TxZ | |
| 21 | 0021-37887 | AM024 | Cassette Platform Z Drive Cor-Res |
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| 22 | 0040-33574 | AM025 | Top Cover, Input Station | |
| 23 | 0090-02233 | AM026 | Interlock PCB, 300mm HDP |
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| 24 | 0090-00456 | AM027 | Cross Brake Up/Down Sensors | |
| 25 | 0100-00132 | AM029 | PWB Assy, Sync Detect |
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| 26 | 0100-00584 | AM030 | PCB, Ch. Backplane, 300mm CPCI | |
| 27 | 0100-00734 | AM032 | PCB, Chamber Dist., 300mm HDP |
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| 28 | 0100-01321 | AM033 | Assy, PCB DIO Board |
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| 29 | 0100-09293 | AM035 | LI / APC Matrix Board Assy |
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| 30 | 0100-20066 | AM037 | Analog Sync Detect Board |
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| 31 | 0100-20453 | AM038 | PCB, Digital I/O, 300mm HDP |
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| 32 | 0100-71088 | AM041 | Chamber Gas Backplane |
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| 33 | 0190-02506 | AM043 | CDN491 Data BD |
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| 34 | 0190-03680 | AM044 | I/O Backplane |
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| 35 | 0190-05111 | AM045 | Control Video Switch | |
| 36 | 0190-05647 | AM046 | PCB, Serial, SBS | |
| 37 | 0190-07847 | AM047 | PCB, Video, SBS |
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| 38 | 0190-07905 | AM048 | Power Supply, UPS, Inova | |
| 40 | 0190-07906 | AM049 | DC/DC Power Supply, Model 10616 | |
| 41 | 0190-09796 | AM050 | LCF Sensor Interface Board |
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| 42 | 0190-12148 | AM052 | CDN396-6-3, Analog I/O |
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| 43 | 0190-12218 | AM053 | Single Board Computer, SBS |
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| 44 | 0190-14224 | AM054 | Flex Dist. Assy, 300mm Centura |
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| 45 | 0190-35198 | AM055 | Assy, Optical Sensor/Cable |
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| 46 | 0190-35961 | AM056 | Assy, Optical Sensor/Cable |
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| 47 | 0200-09716 | AM057 | Pin, Lift, Heater WxZ | |
| 48 | 0200-18095 | AM058 | Color, Min. Contact, 200mm HDP | |
| 49 | 0200-35427 | AM059 | Rib, Insert, 5.00, Cool Down | |
| 50 | 0200-35596 | AM060 | Window, Slit, AL203 | |
| 51 | 0240-92272 | AM061 | Kit, R/FIT, Transducer, 0-3000PSI |
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| 52 | 0270-20081 | AM062 | Tool Orienter Cal, 6", New DeGas | |
| 53 | 0660-00090 | AM063 | CDN497, Interlock Base Module |
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| 54 | 0660-00091 | AM064 | CDN497, Interlock Expansion |
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| 55 | 0660-01879 | AM065 | CDN491, Digital I/O, DeviceNet |
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| 56 | 0660-01880 | AM066 | CDN496, Analog I/O, DeviceNet | |
| 57 | 1410-01105 | AM067 | HTR, Elbow JKT, NW40, 96W | |
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Please email us at sales@mattron.com to check the availability of parts not listed above. |
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