IN OEM Part No. Part No. Description
1 0010-05670 AM001 Roller Assembly 2
2 0015-90001 AM003 Transducer, Modified, 0-3000PSI
3 0020-09617 AM004 Bushing, Rear  
4 0020-10486 AM005 Rod, Spacer, DPA-Shrink  
5 0020-24100 AM006 8" Insulator with Anteane PC2
6 0020-20784 AM007 TC Holder  
7 0020-21901 AM009 Bracket  
8 0020-29310 AM010 Pin, 1/8'' Coil Support
9 0020-29342 AM011 Nut, RF Feedthru, .250"  
10 0020-31017 AM012 Bushing Terminal  
11 0020-31425 AM013 Mixer, Gas Box Lid  
12 0020-31628 AM014 Insulating Washer  
13 0020-70271 AM015 Pivot, One Piece, Left  
14 0020-78554 AM016 Ring, 8" Wafer, Oxide  
15 0021-12855 AM017 Housing, Quartz Tube TXZ 300mm
16 0021-13589 AM018 Cover Shuttle, Input Station  
17 0021-16505 AM019 Upper Shield Exhaust 300mm TXZ  
18 0021-19343 AM020 Ring, Nut Sector 300mm
19 0021-21469 AM021 Ring Restraint, 1.574 Dia Shaft, 8"
20 0021-35987 AM022 RF Strap, TxZ MCVD  
21 0021-36021 AM023 Pin, Heater, TxZ  
22 0021-37887 AM024 Cassette Platform Z Drive Cor-Res
23 0040-33574 AM025 Top Cover, Input Station  
24 0090-02233 AM026 Interlock PCB, 300mm HDP
25 0090-00456 AM027 Cross Brake Up/Down Sensors  
26 0100-00132 AM029 PWB Assy, Sync Detect
27 0100-00584 AM030 PCB, Ch. Backplane, 300mm CPCI  
28 0100-00658 AM031 Interlock PCB, 300mm RTP  
29 0100-00734 AM032 PCB, Chamber Dist., 300mm HDP
30 0100-01321 AM033 Assy, PCB DIO Board
31 0100-09293 AM035 LI / APC Matrix Board Assy
32 0100-20066 AM037 Analog Sync Detect Board
33 0100-20453 AM038 PCB, Digital I/O, 300mm HDP
34 0100-35250 AM039 PCB Assy, Chamber Interface, DPS
35 0100-71088 AM041 Chamber Gas Backplane
36 0190-02506 AM043 CDN491 Data BD
37 0190-03680 AM044 I/O Backplane
38 0190-05111 AM045 Control Video Switch  
40 0190-05647 AM046 PCB, Serial, SBS  
41 0190-07847 AM047 PCB, Video, SBS
42 0190-07905 AM048 Power Supply, UPS, Inova  
43 0190-07906 AM049 DC/DC Power Supply, Model 10616  
44 0190-09796 AM050 LCF Sensor Interface Board
45 0190-11817 AM051 PCB, CP3-SER16-TTL, SBS  
46 0190-12148 AM052 CDN396-6-3, Analog I/O
47 0190-12218 AM053 Single Board Computer, SBS
48 0190-14224 AM054 Flex Dist. Assy, 300mm Centura
49 0190-35198 AM055 Assy, Optical Sensor/Cable
50 0190-35961 AM056 Assy, Optical Sensor/Cable
51 0200-09716 AM057 Pin, Lift, Heater WxZ  
52 0200-18095 AM058 Color, Min. Contact, 200mm HDP  
53 0200-35427 AM059 Rib, Insert, 5.00, Cool Down  
54 0200-35596 AM060 Window, Slit, AL203  
55 0240-92272 AM061 Kit, R/FIT, Transducer, 0-3000PSI
56 0270-20081 AM062 Tool Orienter Cal, 6", New DeGas  
57 0660-00090 AM063 CDN497, Interlock Base Module
58 0660-00091 AM064 CDN497, Interlock Expansion
59 0660-01879 AM065 CDN491, Digital I/O, DeviceNet
60 0660-01880 AM066 CDN496, Analog I/O, DeviceNet  
61 1410-01105 AM067 HTR, Elbow JKT, NW40, 96W  

Please email us at sales@mattron.com to check the availability of parts not listed above.